NON-CONTACT THREE-DIMENSIONAL SHAPE MEASURING MACHINE AND METHOD FOR MEASURING SHAPE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a non-contact three-dimensional shape measuring machine, capable of accurately composing a frame image even without moving a measuring head at a constant speed to measure a highly accurate shape.SOLUTION: A non-contact three-dimensional shape measuring machine for composing the three-dimensional shape of an object to be imaged on the basis of a frame image imaged by a camera while scanning a measuring head 10 in the optical axis direction (the Z-axis) and position information acquiring the image comprises: means 12 for detecting scanning positions dZand dZof the measuring head 10 while imaging a plurality of raw images; and means for creating an interpolation image by linear interpolation using information on the scanning position dZand dZto the imaged raw images 1 and 2 and creating a composition frame image using the interpolation image.SELECTED DRAWING: Figure 3