Apparatus for transferring a substrate, apparatus for vacuum processing a substrate, and method for maintaining a magnetic levitation system

摘要

An apparatus (100) for transporting a substrate (10) is provided. The apparatus (100) includes a vacuum chamber (110) having a chamber wall configured to separate a vacuum side (101) from an ambient atmosphere side (102), and a substrate carrier (140) within the vacuum chamber (110). Includes a magnetic levitation system (120) configured to levitate in a non-contact manner. The magnetic levitation system (120) is configured to provide a magnetic force (F) acting on the substrate carrier (140) while transferring the substrate carrier (140) along a transfer path within the vacuum chamber (110). At least one magnetic device (122) and at least one holding unit (130) configured to hold at least one magnetic device (122) accessible from the ambient atmosphere side (102). [Selection] Figure 1