Ion source housing assembly for controlling ion beam extraction stability and ion beam current

摘要

The present specification provides a method for improving ion beam extraction stability and ion beam current. In one method, an ion source housing assembly can include an ion source housing that surrounds an ion source that includes an arc chamber, the ion source housing being fitted with an extraction aperture plate at a proximal end thereof. The ion source housing assembly further includes a vacuum liner disposed inside the ion source housing to form a barrier near the set of vacuum pump openings. According to the configuration, the opening of the ion source housing assembly is encased by the extraction aperture plate and the vacuum liner, except for the aperture in the extraction aperture plate, thereby creating an attached arc or exterior generated outside the arc chamber. Ensure that external ions remain in the ion source housing. Only ions generated in the arc chamber exit the ion source housing through the openings in the extraction aperture plate.