Source housing assembly for controlling ion beam extraction stability and ion beam current

摘要

Approaches for improving ion beam extraction stability and ion beam current for ion extraction systems are provided in the present application. In one approach, the source housing assembly may include a source housing surrounding an ion source including an arc chamber, and the source housing has an extraction aperture plate mounted at its proximal end. The source housing assembly further includes a vacuum liner disposed within the source housing to form a barrier around the set of vacuum pumping apertures. As configured, the holes in the source housing assembly in addition to the holes in the extraction aperture plate are encapsulated in the extraction aperture plate and the vacuum liner to ensure that the sub-arcs produced outside the arc chamber or externally generated ions remain within the source housing. Only ions of interest produced in the arc chamber pass through the aperture of the extraction aperture plate and exit the source housing.