EVALUATION METHOD OF PROBE FOR ATOMIC FORCE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide an evaluation method of a probe for an atomic force microscope in which a probe shape such as an abrasion state of a probe before/after use can be quantitatively and objectively determined, and the state of deterioration of the probe can be easily known.SOLUTION: An evaluation method has: a process S11 of measuring a surface shape of a standard sample by using an initial probe; a process S12 of analyzing data of the surface shape of the standard sample which is obtained by the initial probe and obtaining a surface area ratio K; a process S13 of setting a threshold value of the surface area ratio of the standard sample based on the surface area ratio K; a process S21 of measuring a surface shape or surface roughness of a measurement sample by using the probe; a process S31 of measuring the surface shape of the standard sample by using the probe with the use count x of 1 or more; a process S32 of analyzing the data of the surface shape of the standard sample which is obtained by the probe and obtaining a surface area ratio K; and a process S33 of determining that the probe is usable in the case where the surface area ratio Kfulfills a relational expression between the surface area ratio Kand the surface area ratio K.SELECTED DRAWING: Figure 2