TRANSPORT DEVICE, OPTICAL ALIGNMENT PROCESSING APPARATUS AND OPTICAL ALIGNMENT FILM FORMATION SYSTEM

摘要

PROBLEM TO BE SOLVED: To achieve an optical alignment processing apparatus capable of curtailing an installation area and cost without deteriorating production efficiency, an optical alignment film formation system or a transport device to transport substrates and work-pieces.;SOLUTION: The optical alignment processing apparatus includes a lamp unit 11 for emitting polarized light, substrate support bodies 12a, 12b each of which has a mechanism capable of individually performing a fine angle adjustment and supports each of two substrates W1, W2; a processing operation part to cause the substrate support bodies 12a, 12b to travel under the lamp unit 11 in parallel to each other; an angle adjustment mechanism 41 for changing the directions of the substrates W1, W2 roughly vertically and horizontally; and a transportation robot 2 for transporting the substrates W1, W2 passing through the angle adjustment mechanism 41 onto the substrate support bodies 12a, 12b.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT