DRIVING DEVICE WITH MECHANICAL VIBRATION SUPPRESSION FUNCTION, AND SYSTEM WITH MECHANICAL VIBRATION SUPPRESSION FUNCTION

摘要

PROBLEM TO BE SOLVED: To suppress vibration that is generated with operation of a machine, without requiring a complicated synchronization command.SOLUTION: A driving device with a mechanical vibration suppression function comprises: a damper-side linear motor including a fixed part that is fixed to a machine base, and a movable part; a driving-side linear motor including a fixed part that is fixed to the movable part of the damper-side linear motor, and a movable part; first detection means configured to detect a first position that is a position of the movable part of the driving-side linear motor in relative to the machine base; second detection means configured to detect a second position that is a position of the movable part of the damper-side linear motor in relative to the machine base; third detection means configured to detect a third position that is a position of the movable part of the driving-side linear motor in relative to the movable part of the damper-side linear motor; driving-side control means configured to control the driving-side linear motor based on the first position and the third position; and damper-side control means configured to make the damper-side linear motor function as a damper by controlling the damper-side linear motor based on the second position.SELECTED DRAWING: Figure 1