DRIVE APPARATUS COMPRISING MECHANICAL VIBRATION SUPPRESSION FUNCTION, AND SYSTEM COMPRISING MECHANICAL VIBRATION SUPPRESSION FUNCTION

摘要

An apparatus or system comprises: a damper side linear motor; a drive side linear motor; a first detection unit that detects a first position that is a position of a movable portion of the drive side linear motor in relation to a machine base; a second detection unit that detects a second position that is a position of a movable portion of the damper side linear motor in relation to the machine base; a third detection unit that detects a third position that is a position of the movable portion of the drive side linear motor in relation to the movable portion of the damper side linear motor; a drive side control unit that controls the drive side linear motor, based on the first position and the third position; and a damper side control unit that controls the damper side linear motor, based on the second position.