Inspection vs. design alignment using built-in targets

摘要

A method and system for locating an output generated by an inspection subsystem in a design data space is provided. In one method, one or more alignment targets are selected from the design associated with the specimen. At least a portion of the one or more alignment targets includes a built-in target incorporated in the design for purposes other than the alignment of the inspection result with respect to the design data space. One or more individual device features are not included in at least the portion of the one or more alignment targets. And using one or more images of the or those alignment targets and the output generated by the inspection subsystem at the position of the or those alignment targets. Other output design data space positions can be specified by various methods described in the present application.