Method for removing diborane and diborane removing agent

摘要

PROBLEM TO BE SOLVED: To provide a technique to remove diborane safely and efficiently and a diborane remover.SOLUTION: A diborane removal method includes making diborane or a gas mixture comprising diborane pass through a liquid mixture comprising a ketone compound represented by formula (I) and a compound represented by formula (II) or formula (III) (R1 and R2 independently represent H, an alkyl group or an aryl group; R1 and R2 may be bound together to form a ring) (R3-R9 independently represent an alkyl group, or an aryl group; adjacent two groups may be bound together to form a ring).SELECTED DRAWING: None