Physical property value measuring device, physical property value measuring method and program

摘要

The physical property value measuring device (1) irradiates the sample (10) with heating light obtained by intensity pulse-modulating the output light of the heating laser (12), irradiates the sample (10) with output light of the temperature measuring laser The sample (10) is irradiated with delayed temperature measurement light. Among the detection signals of the reflected light of the temperature measuring light, the component synchronized with the frequency of the intensity pulse modulation is amplified by the lock-in amplifier (17), and the obtained thermoreflectance signal is subjected to a regression analysis by the computer (18). Regression analysis uses a theoretical formula of the transfer function which is a Laplace transform on the time of the response function by single pulse heating with respect to the Fourier coefficient when Fourier series expansion of the detection signal of reflected light of temperature measurement light is developed with respect to time Calculate thermophysical properties by regression analysis.