Physical property value measuring apparatus, physical property value measuring method and program

摘要

The physical property measuring device (1) irradiates the sample (10) with heating light obtained by intensity-pulse-modulating the output light of the heating laser (12), and the output light of the temperature measuring laser (13) is used as the heating light. The sample (10) is irradiated with temperature measuring light delayed with respect to the sample. A component synchronized with the frequency of intensity pulse modulation in the detection signal of reflected light of the temperature measuring light is amplified by the lock-in amplifier (17), and the obtained thermoreflectance signal is subjected to regression analysis by the computer (18). In regression analysis, using the theoretical formula of the transfer function, which is the Laplace transform for the time of the response function by single pulse heating, with respect to the Fourier coefficient when the detection signal of the reflected light of the temperature measuring light is Fourier series expanded with respect to time. The thermophysical property value is obtained by regression analysis.