Electron spin resonance measuring device, semiconductor device, and method for measuring electron spin resonance

摘要

PROBLEM TO BE SOLVED: To provide an electron spin resonance measurement device that has a simplified structure and is capable of measuring electron spin resonance more easily.SOLUTION: An electron spin resonance measurement device 100 comprises a magnetic field applying part 3, an inductor part 11, an oscillation circuit formation part 13, an oscillation frequency counter 7, and a spectrum acquisition section. The magnetic field applying part 3 applies a first magnetic field to a measuring object M. The inductor part 11 applies a second magnetic field, which is an AC magnetic field, to the measuring object M. The oscillation circuit formation part 13 is connected with the inductor part 11 to form an oscillation circuit. The oscillation circuit formation part 13 changes an element parameter to change a frequency of the second magnetic field. The oscillation frequency counter 7 measures an oscillation frequency of the oscillation circuit. The spectrum acquisition section associates the oscillation frequency with the element parameter to acquire an electron spin resonance spectrum expressed as a function of the element parameter of the oscillation frequency.SELECTED DRAWING: Figure 1