Optical axis adjusting method of confocal measuring device, confocal measuring system, program, and recording medium storing program

摘要

PROBLEM TO BE SOLVED: To provide an optical axis adjustment method that causes optical axes of facing two confocal measurement devices to be highly accurately aligned.SOLUTION: An optical axis adjustment method includes the following steps 1 to 4: in the first step, a light projector of a first confocal measurement device is configured to emit detection light including a plurality of kinds of light mutually different in values of an optical parameter; in the second step, a measurement unit of a second confocal measurement device is configured to measure intensity of the detection light; in the third step, in an intensity distribution of the detection light with respect to the optical parameter, two peak values having the intensity of the detection light peaked are configured to be detected; and in the fourth step, when two peak values include a first peak value and second peak value, a first parameter value of the optical parameter corresponding to the first peak value and a second parameter value of the optical parameter corresponding to the second peak value mutually get closer, and at least one housing of the first confocal measurement device and the second confocal measurement device is caused to be moved until the first parameter value and the second parameter value agree with each other.