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Thermal infrared detector and method for manufacturing thermal infrared detector
Thermal infrared detector and method for manufacturing thermal infrared detector
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机译:热红外探测器及其制造方法
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摘要
In a thermal infrared detector having trench structures, at least one sensor element is provided between the trench structures, an etching hole through which the sensor element is hollowed out and thereby thermally insulated is provided in a substrate rear surface or on the periphery of a pixel area, and an opening portion is provided below the pixel area.
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