Galvano mirror, galvano scanner using galvano mirror, laser beam machine using galvano mirror, and method for manufacturing galvano mirror

摘要

The galvanometer mirror (10) has a mirror surface portion (10A) having a mirror surface and a back reinforcing portion (12) bonded to the back surface side of the mirror surface, and the mirror surface portion (10A) is constituted by a single crystal SiC wafer. Then, the back reinforcing portion (12) is formed of a C / SiC material. Thereby, while improving the rigidity of a mirror surface part, a mirror surface part is made thin and the back surface reinforcement part of a mirror surface part is reduced in weight. As a result, a galvano mirror that is highly accurate and hardly distorted is obtained even if the resonance frequency of the galvano mirror is increased and moved at high speed.