Final-state control for a galvano scanner: Minimizing mirror vibration in an inclined direction relative to the rotation axis

摘要

Galvano scanners are used as laser beam scanners in laser drilling machines. The mirror of the galvano scanner has vibration modes in the rotational direction as well as in the inclined direction. Vibration in an inclined direction causes an error positioning the laser spot in the direction perpendicular to the position. In multiple motion steps, vibration is excited due to the unbalanced moment of the mirror, thereby degrading the positional accuracy. In this study, we propose a feedforward input design method to reduce vibration in the inclined direction. The effectiveness of the proposed method was demonstrated by conducting simulations.