Collector with conical mirror dish, especially for illumination system for wavelengths less than or equal to 126 nm, has mirror segment with axis of symmetry inclined at non-zero angle relative to axis of rotation

摘要

The device is especially for an illumination system for wavelengths less than or equal to 126 nm, especially preferably EUV wavelengths. It has at least one mirror dish with at least one mirror segment (1500.1,1500.2) that is rotationally symmetrical with respect to a rotation axis (RA), whereby the mirror segment has an axis of symmetry (SA). The axis of symmetry is inclined at a non-zero angle relative to the axis of rotation. Independent claims are also included for (A) an illumination system for lithography (B) a projection illumination system (C) and a method of manufacturing microelectronic components.