Cold trap and control method of cold trap

摘要

A cold trap includes a cold panel, a cryocooler which cools the cold panel, a stage temperature control unit which determines a control input to the cryocooler to cool a cooling stage of the cryocooler to a target temperature, an input heat estimation unit which estimates an increase of input heat into the cold panel based on the control input to the cryocooler determined by the stage temperature control unit, and a target temperature adjustment unit which adjusts a target temperature based on the increase of the input heat estimated by the input heat estimation unit.