providing a work piece for removing of layers of solid material and/or the solid bodies,wherein the work piece comprises at least one exposed surface,generating defects inside the work piece,wherein the defects define at least one crack directing layer,wherein the crack directing layer describes at least one three-dimensional contour;attaching or generating a receiving layer at the exposed surface of work piece by forming a composite structure,thermal treating of the receiving layer for generating stresses inside the work piece, wherein the stresses are causing a crack propagation inside the work piece,wherein a layer of solid material or a three-dimensional solid body is separated along the crack directing layer due to the crack propagation, wherein a surface of the layer of solid material or a surface of the solid body corresponds to the three-dimensional contour of the crack directing layer."/> Combined method for producing solids, involving laser treatment and temperature-induced stresses to generate three-dimensional solids
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Combined method for producing solids, involving laser treatment and temperature-induced stresses to generate three-dimensional solids

机译:结合固体的生产方法,包括激光处理和温度引起的应力以产生三维固体

摘要

The present invention relates to a method for the production of at least one three-dimensional layer of solid material, in particular for usage as wafer, and/or at least one tree-dimensional solid body. The inventive method preferably comprises the following steps:providing a work piece for removing of layers of solid material and/or the solid bodies,wherein the work piece comprises at least one exposed surface,generating defects inside the work piece,wherein the defects define at least one crack directing layer,wherein the crack directing layer describes at least one three-dimensional contour;attaching or generating a receiving layer at the exposed surface of work piece by forming a composite structure,thermal treating of the receiving layer for generating stresses inside the work piece, wherein the stresses are causing a crack propagation inside the work piece,wherein a layer of solid material or a three-dimensional solid body is separated along the crack directing layer due to the crack propagation, wherein a surface of the layer of solid material or a surface of the solid body corresponds to the three-dimensional contour of the crack directing layer.
机译:用于生产至少一个三维固体材料层的方法技术领域本发明涉及一种用于生产至少一个三维固体材料层的方法,特别是用作晶片和/或至少一个三维固体。本发明的方法优选地包括以下步骤: 提供一种用于去除固体材料和/或固体层的工件, 其中工件包含至少一个暴露的表面, 在工件内部生成缺陷 其中缺陷定义了至少一个裂纹导向层, 其中裂纹导向层描述了至少一个三维轮廓; 通过在工件的裸露表面上形成或附着一个接收层复合结构, 对接收层进行热处理以在工件内部产生应力,其中应力导致裂纹在工件内部传播件, 其中,由于裂纹的传播,固体材料或三维固体沿着裂纹引导层分开,其中一个表面固体材料层或固体表面的厚度对应于裂纹引导层的三维轮廓。

著录项

  • 公开/公告号US10079171B2

    专利类型

  • 公开/公告日2018-09-18

    原文格式PDF

  • 申请/专利权人 SILTECTRA GMBH;

    申请/专利号US201415309224

  • 发明设计人 JAN RICHTER;

    申请日2014-10-08

  • 分类号H01L21/30;H01L21/762;C03B33/02;B23K26;B23K26/53;B28D1/22;H01L21/268;B23K101/40;B23K103;

  • 国家 US

  • 入库时间 2022-08-21 13:06:03

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