首页>
外国专利>
Optical configuration for measurement device using emitter material configuration with quadrant photodetectors
Optical configuration for measurement device using emitter material configuration with quadrant photodetectors
展开▼
机译:使用带有象限光电探测器的发射器材料配置的测量设备的光学配置
展开▼
页面导航
摘要
著录项
相似文献
摘要
A scanning probe responsive in 3 axes is provided for use in a coordinate measuring machine. The scanning probe includes a frame, a stylus suspension portion and a stylus position detection portion. The stylus position detection portion includes a light source and a position indicating element that is fixed relative to the stylus coupling portion and that includes at least one emitter portion having an emitter material (e.g., phosphor) that inputs and absorbs light from the light source and responds by outputting excitation light. In various implementations, the excitation light is directed as measurement light along a measurement spot path (e.g., including a telecentric imaging configuration) to form a measurement spot at a spot location on a position sensitive detector (e.g., a quadrant-type photodetector), for which the spot location changes in response to a corresponding change in a position of the position indicating element and the stylus coupling portion.
展开▼