THIN-FILM STRUCTURAL BODY, METHOD FOR MANUFACTURING THIN-FILM STRUCTURAL BODY, AND SEMICONDUCTOR DEVICE

摘要

A structural body that includes a film that has a phase-separated nanostructure where a separate columnar shape phase is dispersed in a matrix phase that are phase-separated in a state of thermal equilibrium. The matrix phase is formed from any one of a p-type semiconductor material and an n-type semiconductor material, and the separate columnar shape phase is formed from the other semiconductor material. The film is formed on a substrate such that the separate columnar shaped phase and the matrix phase have three-dimensional junction planes.