6-MEMBERED CYCLIC DIENES AS STRONGLY REDUCING PRECURSORS FOR THE GROWTH OF ELEMENT FILMS BY VAPOR PHASE DEPOSITION

摘要

A method for reducing an atom to a reduced oxidation state includes a step of providing a vapor of a first compound having an atom in an oxidized state. A vapor of a reducing agent is provided. The reducing agent is selected from the group consisting of compounds described by formulae I, II, and III:; ;where R¹, R² R³, R⁴ are each independently H, C_1-10 alkyl, C_6-14 aryl, or C_4-14 heteroaryl. The vapor of the first compound is reacted with the vapor of the reducing agent to form a second compound having the atom in a reduced state relative to the first compound.