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POLYMER-HYBRID ELECTRO-OPTIC DEVICES AND METHOD OF FABRICATING POLYMER-HYBRID ELECTRO-OPTIC DEVICES
POLYMER-HYBRID ELECTRO-OPTIC DEVICES AND METHOD OF FABRICATING POLYMER-HYBRID ELECTRO-OPTIC DEVICES
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机译:聚合物混合电光设备和制造聚合物混合电光设备的方法
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摘要
A polymer-hybrid electro-optic device is fabricated by providing a semiconductor substrate, depositing a metal electrode layer on the semiconductor substrate, depositing a dielectric barrier core layer within a gap of the metal electrode layer, patterning a polymer layer to cover the dielectric barrier core layer and partially covering the metal electrode layer, infiltrating the polymer layer with an inorganic component to form a hybrid oxide-polymer layer, and removing excess inorganic component from the semiconductor substrate and metal electrode layer.
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