METHOD OF PROCURING AN AGGLUTINANT STRUCTURE AND A METHOD OF MANUFACTURING A PELLICLE INCLUDING SAID AGGLUTINANT PROCURING METHOD

摘要

There is provided a method for procuring an agglutinant structure or in particular an agglutinant layer, from an agglutinant material, which is laid on an end face of a pellicle frame for gluing the pellicle to a photomask, wherein the agglutinant material is processed into the agglutinant layer passing through one more stages wherein the material is under a helium gas atmosphere; the invention is also about a manufacturing method of a pellicle wherein the agglutinant layer is procured in the above described manner.