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AN AGGLUTINANT FOR PELLICLE, A PELLICLE USING IT AND A METHOD FOR EVALUATING PELLICLE
AN AGGLUTINANT FOR PELLICLE, A PELLICLE USING IT AND A METHOD FOR EVALUATING PELLICLE
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机译:胶凝剂,使用该胶凝剂的胶体和估算胶体的方法
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摘要
A pellicle is proposed in which the agglutinant layer which enable the pellicle to be adhered to a photomask is doped with a mechanoluminescent material so that the uniformness of the thickness of the agglutinant layer can be confirmed, when the pellicle is adhered to the photomask, by observing visually or by CCD camera for any irregularity in the pattern of the light emitted from the agglutinant layer.
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