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Optical interferometric system for measurement of a full-field thickness of a plate-like object in real time
Optical interferometric system for measurement of a full-field thickness of a plate-like object in real time
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机译:用于实时测量板状物体全视场厚度的光学干涉仪系统
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摘要
An optical interferometric system for measurement of a full-field thickness of a plate-like object in real time includes two light sources, two screens, two image capturing devices, and an image processing module. The light sources radiate incident lights toward a reference point on the plate-like object in respective directions to produce respective interference fringe patterns (IFPs). The image capturing devices capture light intensity distribution images respectively of the IFPS imaged respectively on the screens. The image processing module calculates a fringe order at the reference point according to the light intensity distribution images, and obtains a full-field thickness distribution of the plate-like object according to the fringe order.
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