首页> 外国专利> Method for patterning mesoporous inorganic oxide film, and electric device including mesoporous inorganic oxide film patterned by the same

Method for patterning mesoporous inorganic oxide film, and electric device including mesoporous inorganic oxide film patterned by the same

机译:构图介孔无机氧化物膜的方法和包括通过其构图的介孔无机氧化物膜的电子器件

摘要

Provided are a method for patterning a mesoporous inorganic oxide film, the method including a step of forming a mesoporous inorganic oxide film using a composition containing inorganic oxide particles; and a step of forming a pattern on the mesoporous inorganic oxide film using an elastic stamp for pattern formation, and then calcining the mesoporous inorganic oxide, and an electronic device including a mesoporous inorganic oxide film that has been patterned by the patterning method.
机译:本发明提供对中孔无机氧化物膜进行构图的方法,该方法包括以下步骤:使用含有无机氧化物颗粒的组合物形成中孔无机氧化物膜。本发明提供一种电子设备,其包括使用弹性模压在中孔无机氧化物膜上形成图案以形成图案,然后煅烧该中孔无机氧化物,以及包括已经通过构图方法形成图案的中孔无机氧化物膜的电子设备。

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