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ACCELEROMETER WITH COMPATIBILITY TO COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR TECHNOLOGIES
ACCELEROMETER WITH COMPATIBILITY TO COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR TECHNOLOGIES
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机译:兼容于互补金属氧化物-半电子半导体技术的加速度计
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摘要
An accelerometer may include a seismic mass to flex based on acceleration components perpendicular to a surface of a substrate. The seismic mass may include a first electrode and a portion of the substrate. A first surface of the seismic mass may be adjacent to a first cavity in the substrate, and a second surface of the seismic mass being adjacent to a second cavity. The first surface of the seismic mass and the second surface of the seismic mass may be on opposite sides of the seismic mass. The accelerometer may include a second electrode separated from the second surface of the seismic mass by at least the second cavity.
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