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Accelerometer with compatibility to complementary metal-oxide-semiconductor technologies
Accelerometer with compatibility to complementary metal-oxide-semiconductor technologies
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机译:加速度计与互补的金属氧化物半导体技术兼容
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摘要
An accelerometer may include a seismic mass to flex based on acceleration components perpendicular to a surface of a substrate. The seismic mass may include a first electrode and a portion of the substrate. A first surface of the seismic mass may be adjacent to a first cavity in the substrate, and a second surface of the seismic mass being adjacent to a second cavity. The first surface of the seismic mass and the second surface of the seismic mass may be on opposite sides of the seismic mass. The accelerometer may include a second electrode separated from the second surface of the seismic mass by at least the second cavity.
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