首页> 外国专利> ASYMMETRIC BAND GAP JUNCTIONS IN NARROW BAND GAP MOSFET

ASYMMETRIC BAND GAP JUNCTIONS IN NARROW BAND GAP MOSFET

机译:窄带隙MOSFET中的不对称带隙结

摘要

A semiconductor device with one or more fin structures formed from a first material, gate, source, and drain regions formed from a second material, and a contact insulator layer deposited over the substrate, where an etching process applied to the substrate removes the insulator to create a trench over the source region. The device also includes a lower band gap source material that is deposited into the trench, a second contact insulator layer, and a metalizing material that is deposited over the substrate. In some embodiments, the device also includes a higher band gap source material that is deposited into the trench, a second contact insulator layer, and a metalizing material that is deposited over the substrate.
机译:一种具有一个或多个鳍结构的半导体器件,该鳍结构由第一材料,由第二材料形成的栅极,源极和漏极区域以及沉积在衬底上的接触绝缘体层组成,其中,对衬底进行的蚀刻工艺将绝缘体去除为在源区上方创建沟槽。该装置还包括沉积在沟槽中的下部带隙源材料,第二接触绝缘体层以及沉积在基板上方的金属化材料。在一些实施例中,该器件还包括沉积在沟槽中的较高带隙源材料,第二接触绝缘体层以及沉积在衬底上方的金属化材料。

著录项

  • 公开/公告号US2018190674A1

    专利类型

  • 公开/公告日2018-07-05

    原文格式PDF

  • 申请/专利权人 INTERNATIONAL BUSINESS MACHINES CORPORATION;

    申请/专利号US201815895077

  • 发明设计人 EFFENDI LEOBANDUNG;

    申请日2018-02-13

  • 分类号H01L27/12;H01L29/205;H01L21/3105;H01L29/78;H01L21/84;H01L29/06;H01L29/08;H01L21/306;H01L29/165;

  • 国家 US

  • 入库时间 2022-08-21 12:56:39

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号