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Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus
Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus
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机译:偶极环磁体辅助微波径向线缝隙天线的等离子体处理方法及装置
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摘要
A method and apparatus is provided for obtaining a low average electron energy flux onto a substrate in a processing chamber. A processing chamber includes a substrate support therein for chemical processing. An energy source induced plasma, and ion propelling means, directs energetic plasma electrons toward the substrate support. A dipole ring magnet field is applied perpendicular to the direction of ion travel, to effectively prevent electrons above an acceptable maximum energy level from reaching the substrate holder. Rotation of the dipole magnetic field reduces electron non-uniformities.
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