Method and equipment for automatic positioning for scanning probe microscopy and optical spectroscopy for in situ

摘要

This patent application describes a method and a device capable of automatically positioning a probe used for procedures for scanning microscopy probe (English,Scanning probe microscopy or SPM), including its coupling with optical systems.As in the near field optical microscopy (English scanning near - field optical microscopy (SNOM) or Raman spectroscopy by the effect of the probe (tip enhanced Raman spectroscopy of English or ters),We require that the same is precisely positioned and manipulated.The proposed method and equipment based on the resources of computer vision and positioning control in closed loop using the visual feedback.The experiments of SPM, SNOM and ters are useful in industries of precision manufacturing, microelectronics and biomedical.Among other areas of science and technology in this monitmamento results in an improvement of the quality and reliability of products.