Plasma source using a macro particle reduction coating and method of using Plasma source using a macro particle reduction coating for deposition of thin film coatings and surface modification

摘要

The present invention relates generally to a plasma source utilizing a macroparticle reduction coating and method of using the plasma source utilizing macroparticle reduction for the deposition of thin film coatings and surface modification. more particularly, the present invention relates to a plasma source comprising one or more plasma generating electrodes, wherein a macroparticle reduction coating is deposited on at least a portion of the plasma generating surfaces of one or more more electrodes to protect the electrode plasma generation surfaces from erosion by the plasma produced and to resist particulate matter formation, thereby increasing performance and extending the life of the plasma source.