vertical cavity surface emission laser, laser device and method for manufacturing a vertical cavity surface emission laser

摘要

The present invention relates to a vertical cavity surface emission laser (100) comprising a first electrical contact (105), a substrate (110), a first distributed bragg reflector (115), an active layer (120). , a second distributed bragg reflector (130) and a second electrical contact (135). the vertical cavity surface emission laser comprises at least one alyga (1-y) layer as 0.95 = y = 1 with a thickness of at least 40 nm, the alyga (1-y) layer being as is separated by at least one oxidation control layer (119, 125b). The present invention further relates to a laser device (300) comprising said switch (100), preferably an array of such switches (100), which are driven by an electrical drive circuit (310). The present invention also relates to a method of manufacturing such a carrier (100).