Wavelength tunable ultraviolet laser emission via intra-cavity frequency doubling of an AIGalnP vertical external-cavity surface-emitting laser down to 328 nm

摘要

We demonstrate an optically pumped vertical external-cavity surface-emitting laser in a compact v-shaped cavity configuration for frequency doubling to the ultraviolet (UV) spectral range at ~330 nm. The fundamental red laser emission is realized with a metal-organic vapor-phase epitaxy grown (Ga_xIn_(1-x))_(0.5)P_(0.5)/[(Al_xGa_(1-1))_yIn_(1_y)]_(0.5)P_(0.5) multi-quantum-well structure. Second harmonic generation is accomplished by using a beta barium borate non-linear crystal to generate maximum UV output powers exceeding 100 mW. By using a birefringent filter, we are able to tune the fundamental laser resonance to realize a maximum tuning range of 7.5 nm of the second harmonic.