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Method for chemical extraction of a semiconductor structure and insulation layer from the PLCC, SO, QFP and QFN type electronic components

机译:从PLCC,SO,QFP和QFN型电子元件中化学提取半导体结构和绝缘层的方法

摘要

method of chemical extraction and isolation layer semiconductor structure with electronic components type plcc, so, qfp and qfn is that separating structure of semiconductor process is performed in two stages.in the first stage of chemically removes metallic substrate component using a mixture of concentrated nitric acid and sulfuric acid in the ratio of 1: 2 with the addition of hydrochloric acid in a quantity of from 1 to 20 ml 1 dm3 mixture for copper and brass or a mixture of stu0119u017co substrates used nitric acid and concentrated hydrochloric acid in a proportion of hcl, hno3 h2o: 1: 1: 1 for aluminium substratesthe time from 15 to 60 seconds, at a temperature from 90u00b0c to 100u00b0c. in the second stage removes layers of component together with its housing using a mixture of sulfuric acid and hydrogen peroxide (30%) in a proportion of from 15: 1 to 10: 1, with the addition of tannins in amounts of 5 mg per 1 dm3 mixtures in time ie from 30 seconds to 1 minute at a temperature of from 90 to 120u00b0c.then the component shall be rinsed in acetone scrubber ultrasonic for 15 seconds, with etching and rinsing operations in the second extraction stage is alternately until the wyekstrahowania silicon semiconductor structure.
机译:电子元件类型为plcc的化学提取和隔离层半导体结构的方法,因此,qfp和qfn是半导体工艺的分离结构分两个阶段进行的步骤。第一阶段是使用浓硝酸混合物化学去除金属衬底成分比例为1:2的硫酸,并加入1至20 ml的1 dm3盐酸混合物,用于铜和黄铜的混合物或std,u119和u109co基质的混合物,其中使用硝酸和浓盐酸。对于铝基板,hcl,hno3 h2o的比例为1:1:1:1的时间为15到60秒,温度为90到100。在第二阶段中,使用比例为15:1到10:1的硫酸和过氧化氢(30%)的混合物,将成分层及其外壳去除,并添加5 mg / 1的单宁dm3混合物要在90至120℃的温度下及时(即30秒至1分钟)混合。然后,将组件在丙酮洗涤器中超声清洗15秒,然后在第二个萃取阶段交替进行蚀刻和冲洗操作,直到wyekstrahowania硅半导体结构。

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