PROCEDURE FOR THE IMPLEMENTATION OF A LASER DIODO

摘要

Method for obtaining a laser diode (1) with vertical mirrors, comprising the steps of: - providing (100) a substrate (2) comprising optical layers (4, 6, 8); - performing (102) a first dry etching of said substrate (2), so as to get two opposite transversal facets (10) having a predetermined depth, which represent the lateral walls of a cavity (12); - cleaning (104) the bottom of said cavity (12); - depositing (106) a coating layer (52) on the whole substrate (2); - performing (108) a second etching, so as to free the bottom of the cavity (12) from the coating layer (52); - performing (110) a third deep etching of the bottom of the cavity (12); - removing (112) the coating layer (52), so as to obtain said diode (1) with transversal mirrors (10).