首页> 外国专利> HIGH-RESISTIVITY MONOCRYSTALLINE ZNO-BASED RADIATION DETECTION DEVICE, PREPARATION METHOD THEREFOR, AND APPLICATION THEREOF

HIGH-RESISTIVITY MONOCRYSTALLINE ZNO-BASED RADIATION DETECTION DEVICE, PREPARATION METHOD THEREFOR, AND APPLICATION THEREOF

机译:高电阻单晶Zno基辐射检测装置,制备方法及其应用

摘要

Provided are a high-resistivity monocrystalline ZnO-based radiation detection device, a preparation method therefor, and an application thereof. The preparation method comprises the following steps: S1. preparing a high-resistivity monocrystalline ZnO chip; S2. vapor-depositing metal electrode layers on two sides of the high-resistivity monocrystalline ZnO chip; and S3. combining the chip treated in S2 onto a circuit board, and connecting the chip to the circuit board by means of a gold thread. Moreover, the device performance is tested using an α source, and the device shows an effective radiation response. According to the method, the radiation detection device is prepared using a high-resistivity ZnO material of excellent characteristics such as high irradiation resistance, wide band gap, and high breakdown electric field intensity. The obtained device is simple in structure, simple in manufacturing process, low in costs, and high in repeatability and quality, and has high practicality and a good promoting and application prospect.
机译:提供了一种高电阻率的单晶ZnO基放射线检测装置,其制备方法及其应用。制备方法包括以下步骤:S1。制备高电阻率的单晶ZnO芯片; S2。在高电阻率单晶ZnO芯片的两侧气相沉积金属电极层;和S3。将经过S2处理的芯片结合到电路板上,并通过金线将其连接到电路板上。此外,使用α源测试设备性能,并且该设备显示出有效的辐射响应。根据该方法,使用具有高耐辐射性,宽带隙和高击穿电场强度等特性的高电阻率的ZnO材料来制备放射线检测装置。所得装置结构简单,制造工艺简单,成本低廉,重复性和质量高,具有很高的实用性和良好的推广应用前景。

著录项

  • 公开/公告号WO2018018677A1

    专利类型

  • 公开/公告日2018-02-01

    原文格式PDF

  • 申请/专利权人 SUN YAT-SEN UNIVERSITY;

    申请/专利号WO2016CN95817

  • 发明设计人 HUANG FENG;JI XU;DONG MEI;YAN KUN;

    申请日2016-08-18

  • 分类号H01L31/18;H01L31/0224;H01L31/0296;H01L31/08;C30B29/16;

  • 国家 WO

  • 入库时间 2022-08-21 12:46:10

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