Provided are a high-resistivity monocrystalline ZnO-based radiation detection device, a preparation method therefor, and an application thereof. The preparation method comprises the following steps: S1. preparing a high-resistivity monocrystalline ZnO chip; S2. vapor-depositing metal electrode layers on two sides of the high-resistivity monocrystalline ZnO chip; and S3. combining the chip treated in S2 onto a circuit board, and connecting the chip to the circuit board by means of a gold thread. Moreover, the device performance is tested using an α source, and the device shows an effective radiation response. According to the method, the radiation detection device is prepared using a high-resistivity ZnO material of excellent characteristics such as high irradiation resistance, wide band gap, and high breakdown electric field intensity. The obtained device is simple in structure, simple in manufacturing process, low in costs, and high in repeatability and quality, and has high practicality and a good promoting and application prospect.
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