首页> 外国专利> GRAPHENE FLAKE THIN FILM MANUFACTURING APPARATUS AND GRAPHENE FLAKE THIN FILM MANUFACTURING METHOD

GRAPHENE FLAKE THIN FILM MANUFACTURING APPARATUS AND GRAPHENE FLAKE THIN FILM MANUFACTURING METHOD

机译:石墨烯薄片薄膜制造装置及石墨烯薄片薄膜制造方法

摘要

The graphene flake thin film manufacturing apparatus according to the present invention, which produces graphene on a substrate by using graphite powder, comprises: a substrate disposition unit having a substrate disposed at one side thereof; a nozzle unit which is in a tubular shape having an interior space so as to allow for the movement of graphite powder, has a spray hole at one side thereof, and sprays the graphite powder onto the substrate through the spray hole; and a graphite supply unit communicating with the interior space of the nozzle unit and supplying the graphite powder to the interior space. The graphene flake thin film manufacturing apparatus and graphene flake thin film manufacturing method, according to the present invention, are configured such that graphene flake thin films can be manufactured by depositing graphene on substrates by spraying graphite powder via the nozzle unit so as for same to collide with the substrates at a high speed.
机译:根据本发明的石墨烯薄片薄膜制造设备,其通过使用石墨粉在基板上生产石墨烯,包括:基板布置单元,其一侧布置有基板;喷嘴单元为具有内部空间以允许石墨粉末移动的管状形状,该喷嘴单元在其一侧具有喷射孔,并通过该喷射孔将石墨粉末喷射到基板上。石墨供给单元,其与喷嘴单元的内部空间连通并且将石墨粉供给至内部空间。根据本发明的石墨烯薄片薄膜制造设备和石墨烯薄片薄膜制造方法被配置为使得可以通过经由喷嘴单元将石墨粉末喷涂到基板上而将石墨烯沉积在基板上来制造石墨烯薄片薄膜,从而制造石墨烯薄片薄膜。与基板高速碰撞。

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