CONDUCTIVE FILM PRODUCTION METHOD, CONDUCTIVE FILM, TOUCH PANEL SENSOR, ANTENNA, FINGERPRINT AUTHENTICATION, AND TOUCH PANEL

摘要

The objective of the present invention is to provide a conductive film production method with which it is possible to form a thin metal wire in wire width of 2.0 μｍ or less. The objective of the present invention is to provide a conductive film, a touch panel sensor, an antenna, a fingerprint authentication unit, and a touch panel as well. This conductive film production method includes the steps of: forming a first metal film on a substrate; forming a composition layer for resist film formation on the first metal film; placing a mask on top of the composition layer for resist film formation in such a way that the distance between a mask having formed therein an opening of 1.5 μｍ or less in line width and the first metal film is 1.5 μｍ or less; exposing the composition layer for resist film formation to light by a parallel light exposure machine; obtaining a resist film in which an exposed area is removed and an opening is formed; forming a second metal film inside the opening of the resist film; removing the resist film; and removing a portion of the first metal film and forming a conductive part.