NOZZLE FOR A DISTRIBUTION ASSEMBLY OF A MATERIAL DEPOSITION SOURCE ARRANGEMENT, MATERIAL DEPOSITION SOURCE ARRANGEMENT, VACUUM DEPOSITION SYSTEM AND METHOD FOR DEPOSITING MATERIAL

摘要

A nozzle (100) for being connected to a distribution assembly for guiding evaporated material from a material source into a vacuum chamber is described. The nozzle includes: a nozzle inlet (110) for receiving the evaporated material; a nozzle outlet (120) for releasing the evaporated material to the vacuum chamber; and a nozzle passage (130) extending from the nozzle inlet (110) to the nozzle outlet (120) in a flow direction (111), wherein the nozzle passage (130) comprises an outlet section (131) having an aperture angle (a) which continuously increases in the flow direction (111). Further, a material deposition arrangement having such a nozzle, a vacuum deposition system with the material source arrangement, and a method for depositing evaporated material are provided.