METHOD FOR PURIFYING HYDROGEN OR HELIUM, AND DEVICE FOR PURIFYING HYDROGEN OR HELIUM

摘要

This method that purifies hydrogen or helium from a source gas mainly composed of hydrogen or helium and including volatile aromatic compounds as impurities by using a PSA technique performed using adsorption towers (10A to 10C) filled with absorbents repeats a cycle that includes an adsorption step, a depressurization step, a desorption step, and a cleaning step in the adsorption towers (10A to 10C). The adsorption towers (10A to 10C) are divided into a first region, a second region, and a third region in order from the upstream side to the downstream side in a flow direction of the source gas in the adsorption towers. The first region is filled with a silica gel-based first adsorbent 131 having a fill ratio of 15 to 75 vol% relative to the total fill capacity of adsorbents. The second region is filled with a zeolite-based second adsorbent 132 having a fill ratio of 15 to 75 vol%. The third region is filled with an activated carbon-based third adsorbent 133 having a fill ratio of 5 to 30 vol%.