WAVELENGTH DISPERSIVE X-RAY FLUORESCENCE SPECTROMETER AND X-RAY FLUORESCENCE ANALYZING METHOD USING THE SAME

摘要

This wavelength dispersive X-ray fluorescence spectrometer is provided with: a position-sensitive detector (10) that detects each of the intensities of a secondary X-ray (41) at different spectral angles using a corresponding detection element (7); a measurement spectrum display means (14) that displays, on a display (15), the relation between the position of the detection element (7) in a direction of arrangement and the detection strength of the detection element (7) as a measurement spectrum; a detection area setting means (16) for setting a peak area and a background area; and a quantification means (17) that uses the peak intensity in the peak area, the background intensity in the background area, and a background correction coefficient as a basis to calculate the intensity of X-ray fluorescence to be measured as a net intensity and perform quantitative analysis.