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GRAPHENE NANORIBBON INTERCONNECTS AND INTERCONNECT LINERS
GRAPHENE NANORIBBON INTERCONNECTS AND INTERCONNECT LINERS
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机译:GRAPHENE NANORIBBON互连线和互连线
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摘要
Graphitic nanoribbon interconnects are described. The graphitic nanoribbon interconnects are fabricated by forming a graphitic layer (such as graphene) on a metal feature growth catalyst. The metal feature growth catalyst is selectively removed, leaving a graphitic nanoribbon remaining as the interconnect. Graphitic nanoribbon interconnects have a thickness of from 0.3 nanometers (nm) to 2 nm and a height of at least 40 nm. The conductive graphitic nanoribbon interconnect overcomes the need to include conventionally composed interconnect liners. Furthermore, the reduced feature size of the graphitic nanoribbon interconnect compared to conventional liners enables greater interconnect density and semiconductor device density.
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