CHARGED PARTICLE BEAM DEVICE, ELECTRON BEAM GENERATION DEVICE, X-RAY SOURCE, X-RAY DEVICE, AND METHOD FOR MANUFACTURING STRUCTURE

摘要

This charged particle beam device has: a partition wall section for forming a depressurized or vacuum region; an ejection source, which is disposed in the depressurized or vacuum region, and which ejects charged particles to the inside of the partition wall section; an excitation member disposed outside of the depressurized or vacuum region by having the partition wall section therebetween; and an internal magnetic pole, which is disposed inside of the depressurized or vacuum region, and which serves as a magnetic pole due to a magnetic field generated by the excitation member.