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Charged particle beam device, electron beam generator, X-ray source, X-ray device, and structure manufacturing method
Charged particle beam device, electron beam generator, X-ray source, X-ray device, and structure manufacturing method
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摘要
This charged particle beam device has: a partition wall section for forming a depressurized or vacuum region; an ejection source, which is disposed in the depressurized or vacuum region, and which ejects charged particles to the inside of the partition wall section; an excitation member disposed outside of the depressurized or vacuum region by having the partition wall section therebetween; and an internal magnetic pole, which is disposed inside of the depressurized or vacuum region, and which serves as a magnetic pole due to a magnetic field generated by the excitation member.
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