HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER INCLUDING THE HOLDING ARRANGEMENT, METHOD FOR HOLDING A SUBSTRATE, AND METHOD FOR RELEASING A SUBSTRATE

摘要

A holding arrangement (100) for holding a substrate (101) is described. The holding arrangement includes a substrate support (110) having a substrate support surface (111) configured for supporting the substrate (101); and a substrate tensioning device (120) configured for applying a force between the substrate (101) and the substrate support surface (111), wherein the substrate tensioning device (120) comprises at least one element (130) having a surface (131) with an adhesive arrangement (140) configured for attaching the substrate (101).