A holding arrangement for holding a substrate, a carrier including a holding arrangement, a processing system using a carrier, a method for holding a substrate, and a method for releasing a substrate from a holding arrangement

摘要

The present disclosure relates to a holder for holding a substrate. The holder includes a surface configured to face the substrate, and an adhesive provided on the surface and comprising a plurality of adhesive structures. A plurality of adhesive structures protruding from the surface; And a second adhesive structure protruding from the surface. The first adhesive structure and the second adhesive structure have anisotropic flexibility in parallel with the surface. The directions of least flexibility of the first adhesive structure and the second adhesive structure are different.