Provided are a MEMS device whereby reliability can be improved, liquid jetting head, liquid jetting device, MEMS device manufacturing method, liquid jetting head manufacturing method, and liquid jetting device manufacturing method. This MEMS device (recording head 3) is characterized by being provided with: a first substrate (pressure chamber forming substrate 29), in which a flexible deformable thin film member (vibration plate 31) is laminated; a second substrate (sealing plate 33) that is disposed to the first substrate (pressure chamber forming substrate 29) by having a gap therebetween; and an adhesive layer (43) that bonds the first substrate (pressure chamber forming substrate 29) and the second substrate (sealing plate 33) to each other. The MEMS device (recording head 3) is also characterized in that, in the in-plane direction of the first substrate (pressure chamber forming substrate 29), an end of the thin film member (vibration plate 31) extends further toward the outside than an end of the first substrate (pressure chamber forming substrate 29).
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